Solar Energy

Inline Sputtering Systems

Click image to EnlargeDynavac has made considerable investment into developing inline sputtering systems for the production of solar cells and reflective concentrators. Systems are available for depositing coatings onto large sheets of glass. Glass heating to 300-600°C, coupled with continuous or intermittent motion, is used for obtaining desired film properties. Production rates up to one sheet/minute are achieved while depositing three or more layers by sputtering or evaporation. Ion sources may be incorporated for cleaning or deposition process enhancement.

Click image to EnlargeSystems range from 3 ft to 8 ft wide (or larger) and may accommodate flat glass or formed parts with significant depth. Load locks are used for initial pumpdown with automated transport to successive chambers. Robotic handling of substrates for loading and unloading may also be included. As with all Dynavac systems, integrated control systems are used for transport, heating, vacuum management, deposition process, and communication with factory information networks.

Deposited films include

• Base metal layers
• Semiconductor active layers
• Transparent conductive oxides
• Reflective aluminum or silver layers, including protective overcoats

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