Large Cryopumps

Click image to EnlargeDynavac manufactures 35" and 52" cryopumps for use in pumping large vacuum vessels. These pumps ensure high efficiency operation. Our pumps are equipped with Brooks/Helix cold heads and compressors. They can be mounted horizontal or vertically on a chamber and mated with a standard ASA/ANSI flange to a high vacuum gate valve.

Click image to EnlargeTo minimize heat input, we utilize an optically dense front baffle, cooling front and interior thermal radiation baffle with liquid nitrogen. Careful attention to thermal design results in minimum consumption of liquid nitrogen and rapid cooldown, as well as maintenance of high pumping speeds at pressures to less than 1x 10-7 Torr.

With 2nd stage pumping arrays operating in the 10-20 Kelvin range and employing activated carbon adsorption for light gases, high pumping speeds and capacities for hydrogen are also obtained.

Performance Specifications

Gas	35"	52"
Nitrogen	25,000	55,000
Argon	20,000	45,000
Water	90,000	175,000

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