Gaseous Nitrogen Thermal Conditioning Units

Click image to EnlargeDynavac's gaseous nitrogen thermal conditioning units (TCU) provide high efficiency temperature control of shrouds, platens or cold plates over an operating range of -180°C to 150°C. We offer units for 100, 400, and 1,500 cfm operation. The unit is a closed loop design allowing GN2 to be circulated through the shroud channels using a high-speed blower. Heat transfer between the fluid and shroud is by forced convection while GN2 is heated with an electric immersion heater and cooled by direct LN2 injection (or heat exchanger).

Click image to EnlargeWe maintain the density of the nitrogen at a constant level to optimize thermal performance. Additionally, the pressure in the system is automatically maintained as a function of pressure. Dynavac can control density between 0.3 and 0.4 lb/ft3. Dynavac controls the unit with a PLC; user interface is via a touch screen. It may be controlled to a discrete set point or programmed to execute a thermal profile.

Head Pressure (in-H2O)	40	80	40
Mass flow (lbm/hr)	2,000	7,200	27,000
Refrigeration Capacity (btu/hr@-150)	25,000	100,000	350,000
Heater (kW)	15	20	90
Operating Pressure	0-80 psig	0-80 psig	0-80 psig
Power Requirements	480V, 25 amp, 3 ph, 60Hz	480V, 35 amp, 3 ph, 60Hz	480V, 150 amp, 3 ph, 60Hz
Size	30" W x 60" H x 48" L	36" W x 84" H x 82" L	42" W x 84" H x 88" L
Weight (lbs)	800	1000	1200

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