Sputtering Systems

Dynavac builds sputter deposition systems for a wide variety of applications. We're able to deposit metal films such as aluminum, silver, molybdenum, and chromium on glass, metal, plastic, or foils. Additionally, we sputter a wide range of semiconductor materials and dielectrics including transparent conductive oxides.

Dynavac optimizes the type of sputter source and power supply for the process requirements, to ensure that sputtered films are smooth, dense, and adherent. We also design systems to sputter up, down, or sideways in order to simplify the handling of parts to be coated.

Systems are available to accommodate small-parts and small-quantity applications, using batch systems. Dynavac uses inline systems to deposit on large sheets of glass for production of solar cells, display panels, and other applications. We use glass heating to 300-500 °C, coupled with continuous or intermittent motion, to obtain desired film properties. Our process can achieve production rates to one sheet per minute while depositing three or more layers.

Web-coating systems for sputtering on plastic films and large, batch-style systems for high-volume production are also available.

Large-Area Batch System

Web Handling System

Inline Production System

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