Diamond Like Carbon (DLC) Systems

Systems for Extreme Applications

Amorphous diamond-like carbon (DLC) coatings possess a unique combination of physical, mechanical, and chemical properties, making them an ideal choice for demanding optical applications. When your product calls for a high-performance coating that stands up to extreme environmental impacts, look to the Dynavac DLC Series.

Specialized Coatings. Superior Equipment.

The Dynavac DLC Series provides precise, reliable Plasma Enhanced Chemical Vapor Deposition (PECVD) systems for a host of commercial and military applications, from barcode scanner windows and medical instrumentation to infrared scopes. Our DLC deposition systems produce smooth, ultra-resilient films that offer unparalleled protection against wear, abrasion, and impact coupled with outstanding chemical resistance.

Learn how Dynavac can support your thin film needs. Contact us today.

Highlights

  • 24-inch diameter chamber allows for flexibility in substrate sizes
  • PECVD process using 13.56 MHz excitation and auto-tuning network
  • DLC films with unparalleled protection against wear, abrasion, and environmental conditions
  • Deposition occurs at a constant rate set by plasma parameters with film thickness controlled by deposition time
  • Automatic process with easy-to-use recipes

DLC Film Properties & Compliance

Characteristic Film Properties

  • Uniformity: +/- 1% (across 21” plate)
  • Transmission across 8-12 micron range: >88%

Films pass environmental and durability testing per MIL Standards:

  • Scotch® tape adherence
  • Eraser abrasion
  • Salt-water immersion
  • Salt fog/spray
  • Cycled temperature/humidity
  • Sand slurry with windshield wipe

Vacuum Chamber

Vacuum Chamber

  • 24-inch diameter with mechanical top-lid hoist
  • Turbomolecular pumping system

Process Control

Process Control

  • Plasma-Enhanced Chemical Vapor Deposition (PECVD)
  • 21-inch diameter substrate plate
  • Constant deposition rate set by plasma parameters with film thickness controlled by time
  • Chamber Ocleaning process to maximize system uptime

User Interface

User Interface

  • System functions fully automated with a standard control platform
  • User interface via menu-driven LabVIEW® HMI software
  • Standard screens for System Overview, Process Recipe Development, Data Log/Process Trending and Alarm Status
  • Remote system access

Utilities

Utilities

  • Electrical power: 208/220VAC, 3ph, 60Hz, 100A
  • Compressed air: 80-100 psig • Cooling water: 5-6 gpm @ 15-25°C
  • Process gases: 15-20 psig

Applications

  • Commercial & Military Infrared Devices
  • Wear Resistant
  • Corrosion Resistant
  • Low Friction Applications

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