Hyperion Optical Coating System Platform

A Flexible Platform with Proven Performance

Through its Hyperion Series, Dynavac leverages over 30 years of expertise in optical coating technology.  In facilities around the world, you will find Dynavac systems in operation, handling some of today’s most sophisticated optical coatings.  No matter how complex your coating challenge—anti-reflective, high reflectors, edge filters, polarizers, beam splitters—you can be confident in a proven platform with a reputation for producing precise and repeatable coatings run after run.

The Hyperion platform offers a variety of chamber sizes, fixturing, deposition technologies, and process control options that can be configured for most any type of process requirement. Contact us for all of your optical thin film coating system requirements.

Highlights

  • Typical coating uniformity is less than 2-3%  (less than .5% achievable in some configurations) 
  • Chamber sizes from 760mm–3m
  • Evaporation, sputtering, and ion-assisted process technologies
  • Standard and custom-engineered fixtures
  • User-friendly control interface
  • Advanced optical monitoring solutions

Features and System Configurations

Vacuum Chambers

The Hyperion platform offers the following range of standard-sized chambers:

  • 760mm
  • 900mm
  • 1100mm
  • 1200mm
  • 1300mm
  • 1500mm
  • 1800mm

Chamber highlights

  • Box or split-cylinder designs 
  • Exterior traced with water cooling channels
  • Two sets of stainless-steel wall liners

If you have a custom size or shape requirement, we can create a chamber that meets your specific needs. Contact us for more information. 

Pumping Systems

Hyperion is available with a variety of pumping options to meet specific process requirements.  

  • Roughing systems using oil-sealed or dry mechanical pumps
  • Cryogenic, turbomolecular or diffusion pumps for high-vacuum pumping
  • Removable evaporation baffle for easy cleaning
  • Meissner coil option with liquid nitrogen or closed-cycle cryogenerator

Substrate Fixturing

The Hyperion platform offers the following options to rotate the substrate:

Substrate Tooling: Single Rotation

  • Flat calotte
  • Segmented fixture
  • Domed fixture
  • Flipping mechanism

Substrate Tooling: Planetary Mechanism

  • Multi-planet, dual rotation configurations
  • Custom-engineered tooling

--Loading carts/systems available for large optics

 

Pre-Deposition Treatments

Substrate Heating System 

  • Front-side quartz heating system
  • Back-side Calrod heating system
  • Custom solutions available for heating beyond 300oC

Glow-discharge cleaning system

Ion Source for substrate cleaning

 

Deposition Sources

Deposition Sources:

  • Single or Multi-pocket electron beam sources
  • High current thermal evaporation sources
  • Magnetron cathode – DC, pulsed DC and RF

Ion Sources:

  • End-Hall ion source with hollow-cathode neutralizer
  • RF ion source with hollow-cathode neutralizer

Layer Thickness Control

The Hyperion system offers state-of-the-art layer thickness control to ensure process flexibility, precision and reliability run after run. The following are available:

Control Systems

The Hyperion product line includes a Dynavac-designed control system that can be customized for your unique requirements.

Features 

  • Industrial programmable logic controller for high reliability 
  • Menu-driven graphical interface via LabVIEW software
  • Data logging with user-selected variables
  • Download capability from standard thin film design programs
  • Remote diagnostic capability

 

Applications

  • Ophthalmic Lenses
  • Electronics
  • Astronomical Filters
  • Laser Optics
  • Anti-reflection Optics

Resources

Markets

    Related Products